Byungki Kim, Woocheol Shin, Jinseok Kim, Hyunbong Kim,

Journal of Advanced Technology Research, Vol. 2, No. 2, pp. 21-25, Dec. 2017
10.11111/JATR.2017.2.2.0021, Full Text:
Keywords: Atomic Force Microscopy, Contact Pro ler, 3D Measurement
Abstract

We present a 3D contact surface pro ler inspired from atomic force microscopy (AFM). The surface pro ler is designed to earn three dimensional surface topography of samples through scanning of a probe, which contacts the surface of the samples. Up and down of the probe during its scanning is measured by a laser beam, which reflects from the top of the probe and incidents into boundary of two photo detectors array. Initially, the two detectors receive equal intensity from the laser, but it can be altered if the probe moves up or down. The detectors are mounted on vertical actuator and the actuator is controlled to maintain the two detectors’ signal equal while the probe scans. Thus, the motion of the actuator is linearly proportional to the motion of the probe. This is the way the most AFMs measure surface pro le of their sample. Here, we develop a macro version of AFM to use this as an educational tool for AFMs and contact pro lers. As a metrology tool, the developed 3D contact surface pro ler shows a least 90 μm vertical resolution in its test.

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